Semiconductor device and method for forming the same

ABSTRACT

A semiconductor device in which a gettering layer is formed in a semiconductor substrate, and a method for forming the same are disclosed, resulting in increased reliability of the semiconductor substrate including the gettering layer. The semiconductor device includes a semiconductor substrate; a gettering layer formed of a first-type impurity and a second-type impurity in the semiconductor substrate so as to perform gettering of metal ion; and a deep-well region formed over the gettering layer in the semiconductor substrate.

CROSS-REFERENCE TO RELATED APPLICATION

The priority of Korean patent application No. 10-2013-0089666 filed on29 Jul. 2013, the disclosure of which is hereby incorporated byreference in its entirety, is claimed.

BACKGROUND

Embodiments relate to a semiconductor device in which a gettering layeris formed in a semiconductor substrate and a method for forming thesame, and more particularly to a technology for improving reliability ofthe semiconductor substrate including the gettering layer.

In recent times, semiconductor devices have been rapidly developed toimplement higher speed, higher integration, and lower production costs.In order to implement higher integration and lower production costs ofsemiconductor devices, a technology for increasing the integrationdegree of semiconductor devices through Multi Chip Package (MCP) orSystem In Package (SIP) in a packaging process of the semiconductordevices, has been widely used in various technical fields. For example,MCP or SIP semiconductor devices, in which multiple semiconductor chipsare stacked through at least 9 stages, have been mass produced.

However, there is a need to develop a technology for integrating 10 to20 semiconductor chips. For such multi-layered packaging, a thickness ofa semiconductor substrate including a semiconductor device should begreatly reduced. Also, there is a demand of developing light-weight andhigh-integration semiconductor devices for mobile communication. MCP orSIP-shaped semiconductor devices are also called on to meet suchdemands. To fabricate MCP or SIP-shaped semiconductor devices, there isa need to fabricate a semiconductor chip having a thinner thickness. Inearly 2000's, a semiconductor device was been fabricated to have athickness of 200˜150 μm. In recent semiconductor fabrication processes,a thickness of the recent semiconductor device is gradually reduced toabout 60 μm, and it is expected that a thickness of the semiconductordevice will be reduced to 60 μm or less in future.

However, a thinner substrate may encounter unexpected issues. Thethinner substrate includes a gettering zone configured to capture apollution source (e.g., metal ion) generated in a semiconductorfabrication process. Assuming that a substrate of the semiconductordevice is fabricated to a thickness as thin as about 50 μm or less,there is little or no space to form the gettering zone. Thus, thegettering zone may be removed, deteriorating a gettering function.

SUMMARY

Various embodiments are directed to providing a semiconductor device anda method for forming the same that substantially obviate one or moreissues that may be encountered in the related art.

An embodiment relates to a semiconductor device in which a getteringlayer for gettering metal ions is formed in a semiconductor substrateusing boron (B) ions and phosphorous (P) ions, such that resistance canbe reduced and a leakage current is prevented from occurring, and amethod for forming the semiconductor device.

In accordance with an aspect of the embodiment, a semiconductor deviceincludes: a semiconductor substrate; a gettering layer including afirst-type impurity and a second-type impurity in the semiconductorsubstrate and configured to getter metal impurity; and a deep-wellregion formed over the gettering layer and provided in the semiconductorsubstrate.

The first-type impurity includes P-type impurity and the second-typeimpurity includes N-type impurity.

The first-type impurity includes boron (B) and the second-type impurityincludes phosphorous (P).

The deep-well region is formed by implantation of the second-typeimpurity.

The first-type impurity is implanted with high density.

The deep-well region is formed to partially overlap with the getteringlayer.

In accordance with another aspect of the embodiment, a method forforming a semiconductor device includes: preparing a semiconductorsubstrate comprising a back side including a passivation layer and adenuded zone layer; forming a gettering layer including a first-typeimpurity and a second-type impurity in the denuded zone layer of thesemiconductor substrate; and forming a deep-well region over thegettering layer.

The first-type impurity includes P-type impurity and the second-typeimpurity includes N-type impurity.

The first-type impurity includes boron (B) and the second-type impurityincludes phosphorous (P).

The deep-well region is formed by implantation of the second-typeimpurity.

The method may further include: partially removing the denuded zonelayer.

The method may further include: after the formation of the getteringlayer, removing the passivation layer to expose the denuded zone layer.

The method may further include: after partially removing the denudedzone layer, forming the deep-well region in the denuded zone layer.

In accordance with another aspect of the embodiment, a method forforming a semiconductor device includes: forming a gettering layerincluding a first-type impurity and a second-type impurity over a backside of a semiconductor substrate; and forming a deep-well region overthe gettering layer and provided in the semiconductor substrate.

The first-type impurity includes P-type impurity and the second-typeimpurity includes N-type impurity.

The first-type impurity includes boron (B) and the second-type impurityincludes phosphorous (P).

The deep-well region is formed by implantation of the second-typeimpurity.

The forming the gettering layer includes: forming a single crystallinesilicon layer over a back side of the semiconductor substrate;implanting the first-type impurity into the single crystalline siliconlayer; and implanting the second-type impurity into the singlecrystalline silicon layer in which the first-type impurity is implanted.

The forming the gettering layer includes: providing the singlecrystalline silicon layer, in which the first-type impurity isimplanted, over a back side of the semiconductor substrate; andimplanting the second-type impurity into the single crystalline siliconlayer in which the first-type impurity is implanted.

The forming the gettering layer includes: implanting the first-typeimpurity into the single crystalline silicon layer; implanting thesecond-type impurity into the single crystalline silicon layer; andproviding the single crystalline silicon layer, in which the first-typeimpurity and the second-type impurity are implanted, over the back sideof the semiconductor substrate.

In accordance with an aspect of the embodiment, a semiconductor deviceincludes: a first well provided at a first level; and

a gettering layer provided at a second level and including a firstdoping layer and a second doping layer, wherein the second doping layercomprises polarity opposite to the first doping layer, wherein thesecond level is deeper than the first level, the first doping layer andthe second doping layer overlap at least partially.

The first well and the and the gettering layer are formed in a samesemiconductor substrate.

The first well is formed in a first semiconductor substrate, and whereinthe gettering layer is formed in a second semiconductor substrate.

The first well and the first doping layer have a same polarity.

The device further comprise a deep well provided at a third levelbetween the first and the second level, wherein the deep well and thesecond doping layer have a same polarity.

A concentration of the first doping layer is higher than a concentrationof the deep well.

A concentration of the second doping layer is higher than aconcentration of the deep well.

The device further comprise second well provided at the first level, thesecond well has a polarity opposite to the first well.

The second doping layer is formed between the deep well and the firstdoping layer.

It is to be understood that both the foregoing general description andthe following detailed description of embodiments are exemplary andexplanatory and are not limitative.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view illustrating a semiconductor deviceaccording to an embodiment.

FIG. 2 is a cross-sectional view illustrating a semiconductor device inwhich low-density boron (B) ions are implanted into a gettering layer ofFIG. 1.

FIG. 3 is a cross-sectional view illustrating a semiconductor device inwhich high-density boron (B) ions are implanted into a gettering layerof FIG. 1.

FIG. 4 is a graph illustrating a current variation generated whenhigh-density boron (B) ions are implanted into the gettering layer ofFIG. 3.

FIG. 5 is a conceptual diagram illustrating a resistance (Rs) variationcaused by boron (B) ion implantation density of the gettering layer ofFIG. 1.

FIG. 6 is a cross-sectional view illustrating the semiconductor devicein which boron (B) and phosphorous (P) ions are additionally implantedinto the gettering layer of FIG. 1.

FIG. 7 is a conceptual diagram illustrating a resistance (Rs) variationgenerated when phosphorous (P) ions are additionally implanted into thegettering layer of FIG. 6.

FIGS. 8A-8F are cross-sectional views illustrating a semiconductordevice according to a first embodiment.

FIG. 9 shows an ion-implantation doping profile according to anembodiment.

FIGS. 10A-10E are cross-sectional views illustrating a semiconductordevice according to a second embodiment.

FIGS. 11A and 11B are cross-sectional views illustrating a semiconductordevice according to an embodiment.

FIGS. 12A-12C are cross-sectional views illustrating a semiconductordevice according to an embodiment.

FIG. 13 is a block diagram illustrating a microprocessor according to anembodiment.

FIG. 14 is a block diagram illustrating a processor according to anembodiment.

FIG. 15 is a block diagram illustrating a system according to anembodiment.

FIG. 16 is a block diagram illustrating a memory system according to anembodiment.

DESCRIPTION OF EMBODIMENTS

Embodiments and examples will be described with reference to theaccompanying drawings. Wherever possible, the same reference numberswill be used throughout the drawings to refer to the same or like parts.In the following description, a detailed description of related knownconfigurations or functions incorporated herein will be omitted.

A semiconductor device according to embodiments sequentially implantsN-type high-density boron (B) ion and P-type phosphorous (P) ion into agettering layer, such that the high-density boron (B) ions are combinedwith phosphorous (P) ions, resulting in implementation of electricalneutralization. As a result, the above-mentioned semiconductor devicecan prevent a leakage current from occurring in an overlap between adeep-well region and a gettering layer.

A semiconductor device according to embodiments will hereinafter bedescribed with reference to FIGS. 1 to 16.

FIG. 1 is a cross-sectional view illustrating a semiconductor deviceaccording to an embodiment.

Referring to FIG. 1, the semiconductor according to the embodimentincludes a gettering layer 214 formed over a denuded zone layer 113A′ ofa semiconductor substrate of a cell region (i) and a core region (ii). Adeep-well region 117 is formed over the gettering layer 214. Nwell 121and Cwell 118 are formed over the deep-well region 117 of the cellregion (i). Nwell 121 and PRwell 125 are formed over the deep-wellregion 117 of the core region (ii). In this case, the gettering layer214 is formed by an overlap of boron (B) ion and phosphorous (P) ion,and getters metal ions such as copper (Cu) ions.

When the low-density boron (B) ions are implanted into the getteringlayer 214 as shown in FIG. 2, P-type boron (B) ions (or counter-doping)of the gettering layer 214 and N-type impurity ion of the deep-wellregion 117 come into contact with each other at an area between thegettering layer 214 and the deep-well region 117. Since the density ofboron (B) ions implanted is low, an efficiency of gettering Cu-ionserved by the gettering layer 214 is less.

On the other hand, when high-density boron (B) ions are implanted intothe gettering layer 214, at an area between the gettering layer 214 andthe deep-well region 117, a density of P-type boron (B) ions becomeshigher. Thus, a current path from the gettering layer 214 to thedeep-well region 117 may be formed, resulting in formation of a leakagecurrent. That is, since the density of boron (B) ions of the getteringlayer 214 increases, a Cu-ion gettering function is strengthened, but aleakage current may occur. FIG. 4 is a graph illustrating a currentvariation generated when high-density boron (B) ions are implanted intothe gettering layer shown in FIG. 3. As can be seen from FIG. 4, acurrent amount flowing in the deep-well region 117 increases during theimplantation of high-density boron (B) ions.

FIG. 5 is a conceptual diagram illustrating a resistance (Rs) variationdepending on boron (B) ion implantation density in the gettering layerof FIG. 1. FIG. 5 shows a resistance (Rs) variation depending on thedensity of boron (B) ion implantation into an extrinsic gettering layerof FIG. 2. In more detail, FIG. 5( i) shows low-density boron (B) ionimplantation causing a lower resistance (Rs) value, and FIG. 5( ii)shows high-density boron (B) ion implantation causing a higherresistance (Rs) value. Accordingly, when phosphorous (P) ions areadditionally implanted into the gettering layer 214 after high-densityboron (B) ions are implanted into the gettering layer 214, the Cu-iongettering function is strengthened and at the same time a leakagecurrent does not occur as shown in FIGS. 6-7 is a conceptual diagramillustrating a resistance (Rs) variation generated when additionalphosphorous (P) ions are implanted into the gettering layer 214 which isformed by implantation of high-density boron (B) ions. In FIG. 7, (i)shows a resistance (Rs) value of the gettering layer 214 when neitherboron (B) ions nor phosphorous (P) ions are implanted, (ii) shows aresistance (Rs) value of the gettering layer 214 when only boron (B)ions are implanted, and (iii) shows a resistance (Rs) value of thegettering layer 214 when both boron (B) ions and phosphorous (P) ionsare implanted. As can be seen from FIG. 7, when both boron (B) andphosphorous (P) ions are implanted, the resistance (Rs) value obtainedis lower as compared with when only boron (B) ions are implanted.

As described above, high-density boron (B) and phosphorous (P) ions areimplanted into the gettering layer 214, the metal-ion gettering functioncan be strengthened and a leakage current can be prevented fromoccurring.

A method for forming a semiconductor device according to a firstembodiment will hereinafter be described with reference to FIGS. 8A to8F.

Referring to FIG. 8A, the semiconductor device includes a semiconductorsubstrate 110 in which a passivation layer 111 and a denuded zone layer113 are sequentially stacked. In this case, the passivation layer 111includes an internal micro defect 112 formed by oxygen. In this case, atotal thickness of the semiconductor substrate 100 from a back side 11of the passivation layer 111 to the uppermost part 12 of the denudedzone layer 113 may be about 350 μm. The passivation layer 111 may have athickness of about 150 μm, and the denuded zone layer 113 may have athickness of about 200 μm. Thereafter, boron (B) ions are implanted intoa denuded zone layer 113 to form a gettering layer. Boron (B) ions maybe implanted under various conditions (e.g., dose of 5E14, energy of 1.5MeV, title of 3.5°, and twist of 112°). When boron (B) ions areimplanted into the denuded zone layer 113 as described above, a B-ionimplantation layer 114 is formed in the denuded zone layer 113 as shownin FIG. 8B, such that the denuded zone layer 113 is divided into twodenuded zone layers (113A, 113B). Subsequently, phosphorous (P) ions areadditionally implanted into the B-ion implantation layer 114 as shown inFIG. 8B, transforming the B-ion implantation layer 114 to a getteringlayer 114A.

A gettering layer 114A to which phosphorous (P) ions are added is formedas shown in FIG. 8C. Therefore, electrons and holes of the boron (B) andphosphorous (P) ions are combined, and high-density boron (B) ions areelectrically neutralized and polarities of the ions become disappear,such that a leakage current does not occur. In this case, the getteringlayer 114A and wells 118, 121, 125 which are formed in a subsequentprocess (see FIG. 8F) may be formed together in a single semiconductorsubstrate.

In this case, phosphorous (P) ions may be implanted under variousconditions (e.g., dose of 3E14, energy of 2.75 MeV, title of 3.5°, andtwist of 112°). A profile of the implanted P ions may be as shown in ‘B’of FIG. 9. As can be seen from FIG. 9, boron (B) and phosphorous (P)ions can be neutralized in an overlap region D between the B-ionimplantation profile A and the P-ion implantation profile B.

When phosphorous (P) ions are additionally doped in the B-ionimplantation layer 114, N-type phosphorous (P) ions neutralizehigh-density boron (B) ions, such that no leakage current occurs. Copper(Cu) ion gettering function can be properly achieved even in case wherethe boron (B) ions are neutralized.

As can be seen from FIGS. 8C and 8D, the semiconductor substrate 110 isturned upside down so that the back side 11 becomes a top surface.

Referring to FIG. 8C, in order to reduce a total thickness of thesemiconductor substrate 110, back-grinding is performed on the back side11 such that the passivation layer 111 is reduced to a predeterminedthickness. Accordingly, the semiconductor substrate 110A having areduced thickness is formed, and a thinner passivation layer 111Aremains on the back side 11′ of the semiconductor substrate 110A. Inthis case, the back-grinding process is a thinning process for thinningthe semiconductor substrate.

Thereafter, as shown in FIG. 8D, the entire passivation layer 111A andsome portion of the denuded zone layer 113A are removed by apredetermined thickness so as to implement a stress relief process,resulting in a reduced thickness of the denuded zone layer 113A.Therefore, the semiconductor substrate 1108 may have a very thinthickness which includes the remaining denuded zone layers (113A′, 113B)and the combined gettering layer 114A.

Subsequently, as can be seen from FIGS. 8E and 8F, the semiconductorsubstrate 1108 is turned upside down again, such that the back side 11″of the semiconductor substrate 1108 again faces bottom and the topsurface 12 thereof faces upward. Thereafter, DNWell ion implantation isperformed on the denuded zone layer 113A′ into the semiconductorsubstrate 1108.

Consequently, a deep-well region 117 is formed to contact the getteringlayer 114A as shown in FIG. 8F. In this case, the deep-well region 117may be formed to overlap some portions of the lower gettering layer114A. In addition, N-type impurity for forming the deep-well region 117may include phosphorous (P) ions. Here, the phosphorous (P) ions may beimplanted under particular conditions (e.g., dose of 1.4E13, energy of1.0 MeV, tilt of 3.5°, and twist of 112°). Thereafter, P-type impurityions may be implanted at an implantation energy of 300 KeV into acell-array formation region using a first photoresist pattern (notshown) as a mask, resulting in formation of the Cwell 118. Subsequently,N-type impurity ions may be implanted at an implantation energy of 300KeV into a formation region of a transistor such as PMOS using a secondphotoresist pattern (not shown) as a mask, resulting in formation of theNwell 121. Thereafter, P-type impurity ions are implanted at animplantation energy of 300 KeV using a third photoresist pattern 123 asa mask, such that a PRwell 125 is formed in a formation region of theNMOS transistor. A method for forming the semiconductor device accordingto a second embodiment will hereinafter be described with reference toFIGS. 10A to 10E. In accordance with another embodiment, an extrinsicgettering layer to which high-density boron (B) and phosphorous (P) ionsare added is additionally formed.

A semiconductor substrate 110 in which the passivation layer 111 and thedenuded zone layer 113 are sequentially stacked, is formed as shown inFIG. 8A depicting the first embodiment.

Referring to FIG. 10A, back grinding is performed against the back side13 so as to reduce a total thickness of the semiconductor substrate 110,such that the semiconductor substrate 110 is removed by a predeterminedthickness. Therefore, a semiconductor substrate 110C having a reducedthickness is formed, and a passivation layer 111A having a thinthickness remains on the back side 13 of the semiconductor substrate110C.

As can be seen from FIGS. 10B to 10D, the semiconductor substrate 110 isturned upside down in a manner that the back side 13′ becomes a topsurface and the top surface 14 becomes a bottom surface.

Referring to FIG. 10B, the entire passivation layer 111A and someportions of the denuded zone layer 113 are additionally removed by apredetermined thickness so as to implement a stress relief process.Accordingly, only the denuded zone layer 113C remains on thesemiconductor substrate 110D, such that the semiconductor substrate 110Dmay have a very thin thickness.

Referring to FIG. 10C, a single crystalline silicon layer 115 as anextrinsic gettering layer is provided over the back side 13″ of thesemiconductor substrate 110D in which the denuded zone layer 113Cremains. Therefore, a semiconductor substrate 110E may have a stackedstructure including the denuded zone layer 113C and the singlecrystalline silicon layer 115. Here, boron (B) ions are not implantedinto the single crystalline silicon layer 115. Thereafter, boron (B)ions are doped into the single crystalline silicon layer 115 anextrinsic gettering layer 116 over the back side 13′″ of thesemiconductor substrate, as shown in FIG. 10D.

Subsequently, as shown in FIG. 10D, phosphorous (P) ions are doped intothe extrinsic gettering layer 116 in which boron (B) ions are implanted,such that a gettering layer 116A is formed as shown in FIG. 10E. In thiscase, electrons and holes of the boron (B) and phosphorous (P) ions arecombined, and high-density boron (B) ions are electrically neutralizedand polarities of the ions disappear, such that a leakage current can beprevented. That is, N-type phosphorous (P) ions neutralize high-densityP-type boron (B) ions, such that leakage current can be prevented.Copper (Cu) ion gettering function can be maintained even when the boron(B) ions are neutralized.

Thereafter, as shown in FIG. 10E, the semiconductor substrate is turnedupside down again, such that the top surface 14 faces upward and theback side 13′″ becomes a bottom surface. That is, after thesemiconductor substrate is turned over in a manner that the denuded zonelayer 113C becomes the top surface 14, DNwell ions are implanted intothe denuded zone layer 113C, resulting in formation of a deep-wellregion 117. In this case, the deep-well region 117 may be formed tooverlap some portions of the lower extrinsic gettering layer 116A. Thedenuded zone layer 113D for forming Nwell and PRwell may remain on thedeep-well region 117. Thereafter, in the same manner as shown in FIG.8F, the Cwell 118 is formed by implantation of P-type impurity ion, theNwell 121 is formed by implantation of N-type impurity ion, and thePRwell 125 is formed in a formation region of the NMOS transistor byimplantation of P-type impurity ion. FIGS. 10C and 10D describe examplesin which the single crystalline silicon layer 115 is deposited over thedenuded zone layer 113C, and boron (B) ion and phosphorous (P) ion aresequentially implanted to form a gettering layer 116A. However, as theextrinsic getter layer 116, a pre-doped single crystalline silicon layer115 can be used. For example, a single crystalline silicon layer 115doped with the boron (B) ion may be deposited or attached as shown inFIGS. 11A and 11B showing a third embodiment.

In other words, after boron (B) ions are implanted into a separatesingle crystalline silicon layer 115 so as to form an extrinsicgettering layer 116 as shown in FIG. 11A, the extrinsic gettering layer116 may be deposited or attached over the denuded zone layer 113C.Thereafter, as shown in FIG. 11B, phosphorous (P) ions are implantedinto the extrinsic gettering layer 116 deposited over the denuded zonelayer 113C, resulting in formation of a gettering layer 116A. In thiscase, for gettering of metal ion such as copper (Cu) ion, instead of thesingle crystalline silicon layer 115, a single-silicon layer doped withhigh-density boron ions may be employed. The single-silicon layer dopedwith high-density boron ions may have a thickness of at least 5 μm, suchthat the extrinsic gettering effect can be maximized.

Referring to FIGS. 12A to 12C showing a fourth embodiment, boron (B)ions are implanted into the single crystalline silicon layer 115 asshown in FIG. 12A. Phosphorous (P) ions are additionally implanted asshown in FIG. 12B to a gettering layer 116A. The gettering layer 116A inwhich boron (B) and phosphorous (P) ions are implanted may be depositedor attached over the back side of the denuded zone layer 113C.

As described above, phosphorous (P) ions are additionally implanted intothe B-ion implantation region used as a gettering layer, such that boron(B) ions are captured. As a result, a leakage current which mightgenerate when the B-ion implantation region overlaps with the deep-wellregion 117 is prevented from occurring, and gettering characteristics ofthe B-ion implantation region can be maintained.

FIG. 13 is a block diagram illustrating a microprocessor 1000 accordingto an embodiment. Referring to FIG. 13, the microprocessor 1000 may beconfigured to control and adjust a series of operations for receivingdata from various external devices and outputting the processed resultto the external devices. The microprocessor 1000 serving as asemiconductor device may include a memory unit 1010, an operation unit1020, and a controller 1030, each of which includes logic elements, forexample, various gates implemented by a combination of transistorsformed over the semiconductor substrate, flip-flops, etc. Themicroprocessor 1000 may include a variety of data processors, forexample, a Central Processing Unit (CPU), a Graphic Processing Unit(GPU), a Digital Signal Processor (DSP), an Application Processor (AP),etc.

The memory unit 1010 serving as a processor register or a register iscontained in the microprocessor 1000 to store data, may include a dataregister, an address register, and a floating-point register, and mayinclude a variety of registers. The memory unit 1010 may temporarilystore either data requisite for calculation of the operation unit 1020or execution resultant data, and may store an address in which data forexecution is stored.

The operation unit 1020 is configured to perform internal operation ofthe microprocessor 1000, and performs various four fundamentalarithmetic operations or a logic operation according to the resultobtained by command interpretation of the controller 1030. The operationunit 1020 may include one or more Arithmetic and Logic Units (ALUs).

The controller 1030 may receive signals from the memory unit 1010, theoperation unit 1020, the microprocessor 1000, and other externaldevices, and may perform various control operations such as commandextraction, command analysis, and command input/output, etc. such thatprocesses written by programming can be carried out.

The microprocessor 1000 may include a through silicon via (TSV) tocommunicate with various external devices at high speed. The TSV may bedirectly or indirectly coupled to the controller 1030, the memory unit1010, and the operation unit 1020. In accordance with the aforementionedembodiments, the semiconductor substrate may include a gettering layerand a deep-well region. Here, the gettering layer is formed of afirst-type impurity and a second-type impurity so as to performmetal-ion gettering, and the deep-well region is formed over thegettering layer of the semiconductor substrate. The microprocessor 100according to the embodiment includes the gettering layer formed over thesemiconductor substrate, such that reliability of a TSV structure can beimproved and the microprocessor 1000 having high reliability can operateat a high speed.

The microprocessor 1000 according to the embodiment may include not onlythe memory unit 1010 but also a cache memory unit 1040 for receivingdata from an external device or temporarily storing data to be output tothe external device. In this case, the microprocessor 1000 maycommunicate with the memory unit 1010, the operation unit 1020, and thecontroller 1030 through a bus interface 1050. In addition, the cachememory unit 1040 may be electrically coupled to the TSV.

FIG. 14 is a block diagram illustrating a processor 1100 according to anembodiment.

Referring to FIG. 14, the processor 1100 may include various logicelements, for example, gates implemented by a combination of transistorsformed over a semiconductor substrate, flip-flops, etc. The processor1100 may include a microprocessor configured to control and adjust aseries of operations for receiving data from various external devicesand outputting the processed result to the external devices, and mayinclude a variety of functions, such that throughput improvement andmulti-functional characteristics can be implemented. The processor 1100may include a core unit 1110 serving as a microprocessor, a cache memoryunit 1120 for temporarily storing data, and a bus interface 1130 fordata communication between internal and external devices. The processor1100 may be a variety of system on chips (SoCs) such as a Multi CoreProcessor (MCU), a Graphic Processing Unit (GPU), an ApplicationProcessor (AP), etc.

The core unit 1110 according to the embodiment is used as anarithmetic/logic operator of data received from an external device, andmay include a memory unit 1111, an operation unit 1112, and a controller1113. The memory unit 1111 may function as a processor register or aregister. The memory unit 1111 is contained in the processor 1110 tostore data, may include a data register, an address register, afloating-point register, etc. and may also include a variety ofregisters. The memory unit 1111 may temporarily store either datarequisite for calculation of the operation unit 1112 or executionresultant data, and may store an address in which data for execution isstored. The operation unit 1112 is configured to perform internaloperation of the processor 1100, and performs various four fundamentalarithmetic operations or a logic operation according to the resultobtained by command interpretation of the controller 1113. The operationunit 1112 may include one or more Arithmetic and Logic Units (ALUs). Thecontroller 1113 may receive signals from the memory unit 11111, theoperation unit 1112, the processor 1110, and other external devices, andmay perform various control operations such as command extraction,command analysis, and command input/output, etc. such that processeswritten by programming can be carried out.

Unlike the core unit 1110 operating at high speed, the cache memory unit1120 may temporarily store data to compensate for a difference betweendata processing speeds of a low-speed external device, and may include afirst storage unit 1121, a second storage unit 1122, and a third storageunit 1123. Generally, the cache memory unit 1120 includes the firststorage unit 1121 and the second storage unit 1122. If the cache memoryunit 1120 needs to have high capacity, it may further include the thirdstorage unit 1123. If necessary, the cache memory unit 1120 may furthermany more storage units. That is, the number of storage units containedin the cache memory unit 1120 may be differently established accordingto a variety of designs. In this case, the first, second, and thirdstorage units (1121, 1122, 1123) may have the same or different datastorage and distinction processing speeds. If the first to third storageunits (1121, 1122, 1123) have different processing speeds, the firststorage unit 1121 may have the highest speed.

Although the first, second, and third storage units (1121, 1122, 1123)are configured in the cache memory unit 1120 as shown in FIG. 14, thefirst to third storage units (1121, 1122, 1123) of the cache memory unit1120 may be located outside of the core unit 1110, and it is possible tocompensate for a difference in processing speed between the core unit1110 and the external device. In addition, the first storage unit 1121of the cache memory unit 1120 may be located inside of the core unit1110, and the second and third storage units (1122, 1123) may be locatedoutside of the core unit 1110, such that the function for compensatingfor the processing speed can be more emphasized. On the contrary, thefirst storage unit 1121 and the second storage unit 1122 of the cachememory unit 1120 may be located inside the core unit 1110, and the thirdstorage unit 1123 may be located outside the core unit 1110.

A bus interface 1130 couples the core unit 1110 to the cache memory unit1120, such that data can be more efficiently transmitted through the businterface 1130.

The processor 1100 according to the embodiment may include a pluralityof core units 1110, and a plurality of core units 1110 may share thecache memory unit 1120. The core units 1110 may be coupled to the cachememory unit 1120 through the bus interface 1130. The plurality of coreunits 1110 may be identical in structure to the above-mentioned coreunits. If the processor 1100 includes the core units 1110, the firststorage unit 1121 of the cache memory unit 1120 may be configured ineach core unit 1110 in correspondence to the number of core units 1110,the second storage unit 1122 and the third storage unit 1123 may beintegrated into one storage unit, and the integrated storage unit may belocated outside the plurality of core units 1110 and be shared by anexternal bus interface 1130. Here, the processing speed of the firststorage unit 1121 may be higher than that of the second or third storageunit 1122 or 1123. On the contrary, the first storage unit 1121 and thesecond storage unit 1122 may be configured in each core unit 1110 incorrespondence to the number of core units 1110, the third storage unit1123 may be located outside the plurality of core units 1110 and beshared by an external bus interface 1130.

The processor 1100 according to the embodiment may further include anembedded memory 1140 for storing data; a communication module 1150 fortransmitting/receiving data to/from an external device by wire orwirelessly; a memory controller 1160 for driving an external memorydevice; and a media processor 1170 for processing either data processedby the processor 1100 or input data received from the external inputdevice, and outputting the processed data to the external interfacedevice. Besides the above constituent elements, the processor 1100 mayfurther include a plurality of modules or devices. In this case, theadded modules may transmit/receive data to/from the core unit 1110 andthe cache memory 1120 through the bus interface 1130.

The embedded memory 1140 may include a non-volatile memory and avolatile memory. The volatile memory may include a Dynamic Random AccessMemory (DRAM), a Mobile DRAM, a Static Random Access Memory (SRAM),etc., and may also include other similar memories. The non-volatilememory may include a Read Only Memory (ROM), a Nor Flash Memory, a NANDFlash Memory, a Phase Change Random Access Memory (PRAM), a ResistiveRandom Access Memory (RRAM), a Spin Transfer Torque Random Access Memory(STTRAM), a Magnetic Random Access Memory (MRAM), etc., and may alsoinclude other similar memories.

The communication module 1150 may include a module coupled to a wirednetwork and a module coupled to a wireless network. The wired networkmodule may include a Local Area Network (LAN), a Universal Serial Bus(USB), an Ethernet, a Power Line Communication (PLC), etc. The wirelessnetwork module may include a variety of devices for data communicationwithout using a transfer line. For example, the wireless network modulemay include Infrared Data Association (IrDA), Code Division MultipleAccess (CDMA), Time Division Multiple Access (TDMA), Frequency DivisionMultiple Access (FDMA), Wireless LAN (WLAN), Zigbee, Ubiquitous SensorNetwork (USN), Bluetooth, Radio Frequency Identification (RFID), LongTerm Evolution (LTE), Near Field Communication (NFC), Wireless BroadbandInternet (Wibro), High Speed Downlink Packet Access (HSDPA), WidebandCDMA (WCDMA), Ultra WideBand (UWB), etc.

The memory controller 1160 may manage transmission data between theprocessor 1100 and external storage devices operated according todifferent communication standards, and may include a variety of memorycontrollers and a controller. Here, the controller may controlIntegrated Device Electronics (IDE), Serial Advanced TechnologyAttachment (SATA), Small Computer System Interface (SCSI), RedundantArray of Independent Disks (RAID), Solid State Disc (SSD), External SATA(eSATA), Personal Computer Memory Card International Association(PCMCIA), Universal Serial Bus (USB), Secure Digital (SD), mini SecureDigital card (mSD), micro SD, Secure Digital High Capacity (SDHC),Memory Stick Card, Smart Media Card (SM), Multi Media Card (MMC),Embedded MMC (eMMC), Compact Flash (CF), etc.

The media processor 1170 may include a Graphics Processing Unit (GPU), aDigital Signal Processor (DSP), a High Definition Audio (HD Audio), aHigh Definition Multimedia Interface (HDMI) controller, etc., which areconfigured to fabricate data processed by the processor 1100 and inputdata received from an external input device in such a manner that thefabricated data is configured in the form of audio, video, and otherdata and transferred to the external interface device.

The processor 1100 may include a through silicon via (TSV) formed over asemiconductor substrate so as to communicate with various externaldevices at high speed, differently from various structures such as thecore unit 1110, the cache memory unit 1120, the bus interface 1130, etc.The processor 1100 may include a plurality of TSVs, and may be directlyor indirectly coupled to the core unit 1110, the cache memory unit 1120,the bus interface 1130, etc. In accordance with the aforementionedembodiments, the semiconductor substrate may include a gettering layerand a deep-well region. Here, the gettering layer is formed of afirst-type impurity and a second-type impurity so as to performmetal-ion gettering, and the deep-well region is formed over thegettering layer of the semiconductor substrate. The microprocessor 100according to the embodiment includes the gettering layer formed over thesemiconductor substrate, such that reliability of a TSV structure can beimproved and the microprocessor 1000 having high reliability can operateat a high speed.

FIG. 15 is a block diagram illustrating a system 1200 according to anembodiment.

Referring to FIG. 15, the system 1200 serving as a data processor mayperform a variety of operations such as input, processing, output,communication, and storing actions, and may include a processor 1210, amain memory unit 1220, an auxiliary memory unit 1230, and an interfaceunit 1240. The system according to the embodiment may be any one of avariety of electronic systems operated by a variety of processes, forexample, a computer, a server, a Personal Digital Assistant (PDA), aPortable Computer, a Web Tablet, a Wireless Phone, a mobile phone, asmart phone, a digital music player, Portable Multimedia Player (PMP), acamera, a Global Positioning System (GPS), a video camera, a voicerecorder, a Telematics, an Audio Visual (AV) System, a Smart Television,etc.

The processor 1210 may interpret a command stored therein and a commandreceived from an external part, may perform various processes such ascalculation, comparison, etc. of external input data of the system 1200,and data stored in the main memory unit 1220 or the auxiliary memoryunit 1230 of the system 1200, and external input data. The processor1210 may include various core constructions of the system, for example,a Micro Processor Unit (MPU), a Central Processing Unit (CPU), aSingle/Multi Core Processor, a Graphic Processing Unit (GPU), anApplication Processor (AP), a Digital Signal Processor (DSP), etc. Theprocessor 1200 may include various logic elements, for example, gatesimplemented by a combination of transistors formed over a semiconductorsubstrate, flip-flops, etc.

The main memory unit 1220 may temporarily store or shift program codesor data received from the auxiliary memory device 1230, such that it canexecute the program corresponding to the stored or shifted codes ordata. The main memory unit 1220 may include the semiconductor deviceaccording to the embodiment. The main memory unit 1220 may includevarious volatile memory units having contents to be deleted when poweredoff, for example, Static Random Access Memory (SRAM), a Dynamic RandomAccess Memory (DRAM), etc. The main memory unit 1220 may further includevarious non-volatile memory units having contents to remain unchangedwhen powered off, for example, a Phase Change Random Access Memory(PRAM), a Resistive Random Access Memory (RRAM), a Spin Transfer TorqueRandom Access Memory (STTRAM), a Magnetic Random Access Memory (MRAM),etc. The main memory unit 1220 may include not only various logicelements, for example, gates implemented by a combination of transistorsformed over a semiconductor substrate, flip-flops, etc., but also memorydevices for storing data.

The auxiliary memory unit 1230 is a memory device for storing a programcode or data. The auxiliary memory unit 1230 may store a large amount ofinformation or data whereas it operates at a lower speed than the mainmemory unit 1220. The auxiliary memory unit 1230 may further includedata storage systems, for example, a magnetic tape using a magneticfield, a magnetic disc, a laser disc using light, a magneto-optical discusing the magnetic disc and the laser disc, a Solid State Disc (SSD), aUniversal Serial Bus (USB) memory, a Secure Digital (SD), a mini SecureDigital (mSD) card, a micro SD, a high-capacity Secure Digital HighCapacity (SDHC), a memory stick card (MSC), a Smart Media (SM) card, aMulti Media Card (MMC), an Embedded MMC (eMMC), a Compact Flash (CF)card, etc. The auxiliary memory unit 1230 may include not only variouslogic elements, for example, gates implemented by a combination oftransistors formed over a semiconductor substrate, flip-flops, etc., butalso memory devices for storing data.

The interface unit 1240 may be configured to exchange command and databetween the system of this embodiment and an external device, and may beany of a keypad, a keyboard, a mouse, a speaker, a microphone, adisplay, a variety of Human Interface Devices (HIDs), a communicationdevice, etc., which are configured to achieve data communication througha transmission line. The communication device may include a modulecoupled to a wired network and a module coupled to a wireless network.The wired network module may include a Local Area Network (LAN), aUniversal Serial Bus (USB), an Ethernet, a Power Line Communication(PLC), etc. The wireless network module may include an Infrared DataAssociation (IrDA), a Code Division Multiple Access (CDMA), a TimeDivision Multiple Access (TDMA), a Frequency Division Multiple Access(FDMA), a Wireless LAN, a Zigbee, a Ubiquitous Sensor Network (USN), aBluetooth, a Radio Frequency Identification (RFID), a Long TermEvolution (LTE), a Near Field Communication (NFC), a Wireless BroadbandInternet (Wibro), a High Speed Downlink Packet Access (HSDPA), aWideband CDMA (WCDMA), a Ultra WideBand (UWB), etc., which areconfigured to achieve data communication without using a transmissionline.

The system 1200 may include a through silicon via (TSV) formed over asemiconductor substrate of the processor 1210, the main memory unit1220, or the auxiliary memory unit 230, etc. so as to communicate withvarious external devices at high speed. The processor 1210, the mainmemory unit 1220, the auxiliary memory unit 1230, etc. may include aplurality of TSVs. In accordance with the aforementioned embodiments,the semiconductor substrate may include a gettering layer and adeep-well region. Here, the gettering layer is formed of a first-typeimpurity and a second-type impurity so as to perform metal-iongettering, and the deep-well region is formed over the gettering layerof the semiconductor substrate. The processor 1210, the main memory unit1220, and the auxiliary memory unit 1230, etc. of the system 1200according to the embodiment may include the gettering layer formed overthe semiconductor substrate, resulting in increased reliability of a TSVstructure. As a result, the system 1200 having high reliability canoperate at a high speed.

FIG. 16 is a block diagram illustrating a memory system 1400 accordingto an embodiment of the present invention.

Referring to FIG. 16, the memory system 1400 may include a non-volatilememory 1410 for storing data, a memory controller 1420 for controllingthe non-volatile memory 1410, and an interface 1430 coupled to theexternal device. The memory system 1400 may be configured in the form ofa card, for example, a Solid State Disc (SSD), a Universal Serial Bus(USB) memory, a Secure Digital (SD) card, a mini Secure Digital (mSD)card, a micro SD card, a Secure Digital High Capacity (SDHC), a memorystick card, a Smart Media (SM) card, a Multi Media Card (MMC), anembedded MMC (eMMC), a Compact Flash (CF) card, etc.

The memory 1410 for storing data may further include a non-volatilememory, for example, a Read Only Memory (ROM), a Nor Flash Memory, aNAND Flash Memory, a Phase Change Random Access Memory (PRAM), aResistive Random Access Memory (RRAM), a Magnetic Random Access Memory(MRAM), etc. The memory 1410 serving as a semiconductor device mayinclude not only various logic elements, for example, gates implementedby a combination of transistors formed over a semiconductor substrate,flip-flops, etc., but also memory devices for storing data. The memory1410 may be comprised of a combination of semiconductor devices toimplement higher capacity. The memory 1410 may include a plurality ofTSVs in a semiconductor substrate. In the memory 1420, multiplesemiconductor devices are stacked through TSVs, and are electricallycoupled to each other. In accordance with the aforementionedembodiments, the semiconductor substrate may include a gettering layerand a deep-well region. Here, the gettering layer is formed of afirst-type impurity and a second-type impurity so as to performmetal-ion gettering, and the deep-well region is formed over thegettering layer of the semiconductor substrate. The memory 1410according to the embodiment includes the gettering layer formed over thesemiconductor substrate, such that reliability of a TSV structure can beimproved and the memory 1410 having high reliability can operate at ahigh speed.

The memory controller 1420 may control data exchange between the memory1410 and the interface 1430. For this purpose, the memory controller1420 may include a processor 1421 configured to calculate/processcommands received through the interface 1430 from an external part ofthe memory system 1400. The memory controller 1420 serving as asemiconductor device may include not only various logic elements, forexample, gates implemented by a combination of transistors formed over asemiconductor substrate, flip-flops, etc., but also memory devices forstoring data.

The interface 1430 may exchange commands and data between the memorysystem 1400 and the external device, may be compatible with a UniversalSerial Bus (USB) memory, a Secure Digital (SD) card, a mini SecureDigital (mSD) card, a micro SD card, a high-capacity Secure Digital HighCapacity (SDHC), a memory stick card, a Smart Media (SM) card, a MultiMedia Card (MMC), an Embedded MMC (eMMC), and a Compact Flash (CF) card,and may include similar formats. The interface 1430 may be implementedas different types of interfaces as necessary.

As an interface for an external device, a memory controller, and amemory system are gradually diversified and manufactured to have higherperformance, the memory system 1400 according to the embodiment mayfurther include a buffer memory 1440 configured to efficiently performthe data input/output (I/O) operation between the interface 1430 and thememory 1410. The buffer memory 1440 for temporarily storing data mayinclude the above-mentioned semiconductor device. The buffer memory 1440may include not only various logic elements, for example, gatesimplemented by a combination of transistors formed over a semiconductorsubstrate, flip-flops, etc., but also memory devices for storing data.The buffer memory 1440 may be comprised of a combination ofsemiconductor devices to implement higher capacity. The buffer memory1440 may include a plurality of TSVs in a semiconductor substrate. Inthe buffer memory 1440, multiple semiconductor devices are stackedthrough TSVs, and are electrically coupled to each other. In accordancewith the aforementioned embodiments, the semiconductor substrate mayinclude a gettering layer and a deep-well region. Here, the getteringlayer is formed of a first-type impurity and a second-type impurity soas to perform metal-ion gettering, and the deep-well region is formedover the gettering layer of the semiconductor substrate. The buffermemory 1440 according to the embodiment includes the gettering layerformed over the semiconductor substrate, such that reliability of a TSVstructure can be improved and the buffer memory 1440 having highreliability can operate at a high speed.

In addition, the buffer memory 1440 according to the embodiment mayfurther include a volatile Static Random Access Memory (SRAM), a DynamicRandom Access Memory (DRAM), a non-volatile Phase Change Random AccessMemory (PRAM), a Resistive Random Access Memory (RRAM), a Spin TransferTorque Random Access Memory (STTRAM), a Magnetic Random Access Memory(MRAM), etc.

The memory system 1400 may include a through silicon via (TSV) in asemiconductor substrate of the memory controller 1420 totransmit/receive data to/from data various external devices at highspeed. In the memory system 1400, the memory controller 1420, the memory1410, the buffer memory 1440, etc. are stacked through TSVs, and areelectrically coupled to each other. In accordance with theaforementioned embodiments, the semiconductor substrate may include agettering layer and a deep-well region. Here, the gettering layer isformed of a first-type impurity and a second-type impurity so as toperform metal-ion gettering, and the deep-well region is formed over thegettering layer of the semiconductor substrate. The memory controller1420 of the memory system 1400 according to the embodiment includes thegettering layer formed over the semiconductor substrate, such thatreliability of a TSV structure can be improved and the memory system1400 having high reliability can operate at a high speed.

As is apparent from the above description, the semiconductor device andthe method for forming the same according to the embodiments have thefollowing effects. When forming a through silicon via (TSV), a getteringlayer used for copper (Cu) gettering is formed by implantation ofphosphorous (P) ions after completion of boron (B) ions, such that aleakage current are prevented from occurring.

The above embodiments are illustrative and not limitative. Variousmodifications are possible. The embodiments are not limited by the typeof deposition, etching polishing, and patterning steps described herein.Nor are the embodiments limited to any specific type of semiconductordevice. For example, the embodiments may be implemented in a volatilememory device such as a dynamic random access memory (DRAM) device ornon volatile memory device.

What is claimed is:
 1. A semiconductor device comprising: a semiconductor substrate; a gettering layer including a first-type impurity and a second-type impurity in the semiconductor substrate and configured to getter metal impurities; and a deep-well region formed over the gettering layer and provided in the semiconductor substrate.
 2. The semiconductor device according to claim 1, wherein the first-type impurity includes P-type impurities and the second-type impurity includes N-type impurities.
 3. The semiconductor device according to claim 1, wherein the first-type impurity includes boron (B) and the second-type impurity includes phosphorous (P).
 4. The semiconductor device according to claim 1, wherein the deep-well region is formed by implantation of the second-type impurity.
 5. The semiconductor device according to claim 1, wherein the first-type impurity is implanted with a high density.
 6. The semiconductor device according to claim 1, wherein the deep-well region is formed to partially overlap with the gettering layer. 